Coating of samples for microscopy
US11850620B1 · kind B1 · utility
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13References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 3, 2019 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | May 7, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A coater is provided for depositing a coating onto a sequence of samples to be analyzed in a microscope. The coater includes a process chamber to maintain a low-pressure vacuum or controlled gaseous environment at a deposition region inside the process chamber, a sample conveyor to support and convey samples through the deposition region, an evaporant supply to vaporize material from an evaporant source onto the samples at the deposition region, and a controller to control one or more operations of the coater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.