Transport apparatus, semiconductor manufacturing apparatus, and transport method
US11850743B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2019 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Mar 28, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J13/088
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
There is provided a transport apparatus including: an articulated arm including: a first arm in which a drive motor is installed; a second arm configured to be driven by the first arm; a transmission portion configured to convert a rotation of the drive motor into a rotation of the second arm via a joint; a first detector configured to detect a first sensor value corresponding to a rotation angle of an input shaft of the transmission portion; and a second detector configured to detect a second sensor value corresponding to a rotation angle of the second arm; and a controller configured to control the articulated arm, wherein the controller is further configured to control the second arm to a target rotation angle based on the first sensor value and the second sensor value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.