Apparatus and method of testing an object within a dry gas environment
US11860083B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2021 |
| Grant date | Jan 2, 2024 |
| Priority date | — |
| Expiry date | Dec 3, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.