Controlled degradation of a stimuli-responsive polymer film
US11862473B2 · kind B2 · utility
2Cited by
6References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2021 |
| Grant date | Jan 2, 2024 |
| Priority date | — |
| Expiry date | May 10, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31133
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Removing a stimuli responsive polymer (SRP) from a substrate includes controlled degradation. In certain embodiments of the methods described herein, removing SRPs includes exposure to two reactants that react to form an acid or base that can trigger the degradation of the SRP. The exposure occurs sequentially to provide more precise top down control. In some embodiments, the methods involve diffusing a compound, or a reactant that reacts to form a compound, only to a top portion of the SRP. The top portion is then degraded and removed, leaving film the remaining SRP intact. The exposure and removal cycles are repeated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.