Patent · US Active

Systems and methods for releveled bump planes for chiplets

US11862604B2 · kind B2 · utility

0Cited by
130References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 26, 2021
Grant dateJan 2, 2024
Priority date
Expiry dateApr 26, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/381
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit and a method for designing an IC wherein the base or host chip is bonded to smaller chiplets via DBI technology. The bonding of chip to chiplet creates an uneven or multi-level surface of the overall chip requiring a releveling for future bonding. The uneven surface is built up with plating of bumps and subsequently releveled with various methods including planarization.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.