MEMS device

US11863933B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Niccoló De Milleri · Villach, AT
• Christian Bretthauer · Munich, DE
• Alessandro Caspani · Villach, AT
• Alessandra Fusco · Munich, DE

Key dates

• Filing date: Sep 24, 2021
• Grant date: Jan 2, 2024
• Expiry date: Mar 4, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R2201/003
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A MEMS device includes a MEMS sound transducer, and control circuitry. The control circuitry includes a supply signal provider for providing a high-level supply signal and read-out circuitry for receiving an output signal from the MEMS sound transducer, and a switching arrangement for selectively connecting the MEMS sound transducer to the supply signal provider, and for selectively connecting the MEMS sound transducer to the read-out circuitry based on a control signal. The control circuitry provides the control signal having an ultrasonic actuation pattern to the switching arrangement during a first condition TX of the control signal, wherein the ultrasonic actuation pattern of the control signal triggers the switching arrangement for alternately coupling the high-level supply signal to the MEMS sound transducer.