Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition

US11867931B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Kang Luo · Austin, US
• Xiaopei Deng · Cedar Park, US
• Daihua Zhang · Newark, US
• Ludovic Godet · Sunnyvale, US

Key dates

• Filing date: Sep 23, 2021
• Grant date: Jan 9, 2024
• Expiry date: Sep 23, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/16
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to optical devices and methods of manufacturing optical devices having optical device structures with at least one of varying depths or refractive indices across the surface of a substrate. According to certain embodiments, an inkjet process is used to deposit a volumetrically variable optical device that is etched to form a diffractive optic element (DOE). Volumetrically variable can relate to the thickness of the optical device, or the relative volume of two or more diffractive materials deposited in combination. According to other embodiments, a single-profile DOE is deposited on a substrate and an inkjet process deposits a volumetrically variable organic material over the DOE. The DOE and organic material are etched to modify the profile of the structure, after which the organic material is removed, leaving the modified-profile DOE.