Precursor container
US11873558B2 · kind B2 · utility
0Cited by
5References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 6, 2022 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Sep 6, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45561
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.