Inventor · Vantaa, FI

Tom E. Blomberg

67Patents
9h-index
36Co-inventors
78Inventor score

Filing activity: Apr 17, 2003 → Feb 27, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9129897B2 Metal silicide, metal germanide, methods for making the same Electricity 533 Active
US8841182B1 Silane and borane treatments for titanium carbide films Electricity 513 Active
US10428419B2 Combination CVD/ALD method, source and pulse profile modification Chemistry; Metallurgy 371 Active
US10428421B2 Selective deposition on metal or metallic surfaces relative to dielectric surfaces Chemistry; Metallurgy 56 Active
US10283319B2 Atomic layer etching processes Electricity 17 Active
US10273584B2 Thermal atomic layer etching processes Electricity 15 Active
US10280519B2 Thermal atomic layer etching processes Electricity 14 Active
US9412602B2 Deposition of smooth metal nitride films Electricity 12 Active
US7846499B2 Method of pulsing vapor precursors in an ALD reactor Chemistry; Metallurgy 12 Active
US9062390B2 Crystalline strontium titanate and methods of forming the same Emerging Cross-Sectional Technologies 7 Active
US9379011B2 Methods for depositing nickel films and for making nickel silicide and nickel germanide Electricity 6 Active
US9236247B2 Silane and borane treatments for titanium carbide films Electricity 5 Active
US9023427B2 Methods for forming multi-component thin films Chemistry; Metallurgy 5 Active
US8524322B2 Combination CVD/ALD method and source Chemistry; Metallurgy 5 Active
US9520562B2 Method of making a resistive random access memory Electricity 5 Active
US10056249B2 Atomic layer deposition of antimony oxide films Chemistry; Metallurgy 4 Active
US11114283B2 Reactor, system including the reactor, and methods of manufacturing and using same Electricity 2 Active
US10043880B2 Metal silicide, metal germanide, methods for making the same Electricity 2 Active
US10529563B2 Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures Electricity 2 Active
US11437249B2 Showerhead device for semiconductor processing system Electricity 2 Active
US9941425B2 Photoactive devices and materials Emerging Cross-Sectional Technologies 2 Active
US10982325B2 Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods Electricity 2 Active
US6672259B2 Method for positioning superheaters in biomass burning steam generators, and steam generator Emerging Cross-Sectional Technologies 2 Expired
US11739428B2 Thermal atomic layer etching processes Electricity 1 Active
US9006112B2 Atomic layer deposition of antimony oxide films Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.