Device and method for measuring electron beam
US11874414B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 8, 2021 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | May 15, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24542
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An device for measuring electron beam comprises a Faraday cup comprising an opening; a porous carbon material layer located on a surface of the Faraday cup and suspended at the opening; and an electricity meter electrically connected to the porous carbon material layer. A length of a suspended portion of the porous carbon material layer is greater than or equal to a maximum diameter of an electron beam to be measured. A diameter or a width of the porous carbon material layer is smaller than a minimum diameter of a cross section of the electron beam to be measured. The porous carbon material layer comprises a plurality of carbon material particles, and a plurality of micro gaps exist between the plurality of carbon material particles. A method for measuring an electron beam using the device for measuring electron beam is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.