System and method for controlling measurements of sample's parameters
US11874606B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2021 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Jul 6, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system and method are presented for controlling measurements of various sample's parameters. The system comprises a control unit configured as a computer system comprising data input and output utilities, memory, and a data processor, and being configured to communicate with a measured data provider to receive measured data indicative of measurements on the sample. The data processor is configured to perform model-based processing of the measured data utilizing at least one predetermined model, and determine, for each of one or more measurements of one or more parameters of interest of the sample, an estimated upper bound on an error value for the measurement individually, and generate output data indicative thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.