Vertical memory devices
US11877451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2021 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Nov 15, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B43/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vertical memory device includes a gate electrode structure, a channel, an insulation pattern structure, an etch stop structure, and a through via. The gate electrode structure includes gate electrodes spaced apart from each other on a substrate in a first direction perpendicular to an upper surface of the substrate, and each of the gate electrodes extends in a second direction parallel to the upper surface of the substrate. The channel extends in the first direction through the gate electrode structure. The insulation pattern structure extends through the gate electrode structure. The etch stop structure extends through the gate electrode structure and surround at least a portion of a sidewall of the insulation pattern structure, and the etch stop structure includes a filling pattern and an etch stop pattern on a sidewall of the filling pattern. The through via extends in the first direction through the insulation pattern structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.