Inkjet platform for fabrication of optical films and structures

US11878532B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Daihua Zhang · Newark, US
• Ludovic Godet · Sunnyvale, US
• Michael David-Scott Kemp · San Jose, US
• Kang Luo · Austin, US
• Kazuya Daito · Milpitas, US
• Kenneth S. Ledford · San Jose, US
• Bahubali S. Upadhye · Kanchinakote, IN
• Hemantha Raju · Bengaluru, IN
• John Rusconi · Milpitas, US
• Elsa Massonneau · Sunnyvale, US
• Mahendran Chidambaram · Saratoga, US
• Alexey Stepanov · Troitsk, RU
• Visweswaren Sivaramakrishnan · Cupertino, US

Key dates

• Filing date: Jan 12, 2022
• Grant date: Jan 23, 2024
• Expiry date: Apr 7, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/135
• WIPO field: Textile and paper machines
• WIPO sector: Mechanical engineering

Abstract

Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.