Patent · US Active

Device and method for characterizing the surface shape of a test object

US11879720B2 · kind B2 · utility

0Cited by

1References

15Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jochen Hetzler · Aalen, DE
Holger Jennewein · Oberkochen, DE

Key dates

Filing date	Aug 12, 2021
Grant date	Jan 23, 2024
Priority date	—
Expiry date	Feb 12, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70591
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device and a method for characterizing the surface shape of a test object. The device for characterizing the surface shape of a test object has a test arrangement (130, 230) for determining the surface shape of a test object (111, 112, 113, 211, 212, 213) using a test wave. The test wave has a wavefront generated by diffraction at a diffractive optical element. The device additionally has a first vacuum chamber (110, 210) and a second vacuum chamber (120, 220), wherein the second vacuum chamber (120, 220) has a magazine for mounting at least two diffractive optical elements (121, 122, 123, 221, 222, 223).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.