Process for transfer imprinting
US11880131B2 · kind B2 · utility
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1References
7Claims
0Family size
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Key dates
| Filing date | Dec 19, 2018 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Jun 3, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F2438/02
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A process for transfer imprinting using a novel family of anti-sticking layers, such as for nanoimprint lithography processes, is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.