Acoustic resonator assembly and filter
US11881839B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2020 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Sep 22, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H3/02
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator assembly and a filter are disclosed. The acoustic resonator assembly includes at least two acoustic resonators vertically connected to each other. The acoustic resonator includes: an acoustic mirror, a bottom electrode layer, a piezoelectric layer, and a top electrode layer that are arranged on a substrate. An active area of the acoustic resonator is defined by an overlapping area of the acoustic mirror, the bottom electrode layer, the piezoelectric layer, and the top electrode layer. The acoustic resonator further includes a support layer arranged on the substrate or the piezoelectric layer on a periphery of a projection of the acoustic mirror on the substrate. The at least two acoustic resonators are vertically connected to each other through the support layer. The filter significantly reduces the volume and the area of a device, improves design freedom and reduces design difficulty, enhances product performance and greatly reduces costs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.