Stud attachment device and stud attachment method with independent temperature/pressure control
US11892767B2 · kind B2 · utility
0Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2021 |
| Grant date | Feb 6, 2024 |
| Priority date | — |
| Expiry date | Apr 20, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70983
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stud attachment device for attaching a plurality of studs to a photomask constituting a reticle. The stud attachment device including a body; a plurality of holders extending from the body, the holders allowing the studs to be laid thereon, respectively; and a pressure regulator for independently controlling pressures of the holders when the studs are attached to the photomask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.