Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
US11898912B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jul 1, 2021 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Jan 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a hyperspectral imaging (HSI) apparatus. The HSI apparatus includes: a first slit plate configured to introduce an output beam; a first aspherical mirror configured to reflect the introduced output beam; a first grating having a planar reflective surface, the first grating configured to generate a plurality of first split beams by splitting the output beam after being reflected by the first aspherical mirror; and a first camera configured to detect the plurality of first split beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.