System and method to weight defects with co-located modeled faults
US11899065B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2022 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Aug 17, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/318314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for generating defect criticality are disclosed. Such systems and methods may include identifying defect results including a defect and a defect location. Such systems and methods may include receiving fault test recipes configured to test potential faults at a plurality of testing locations. Such systems and methods may include identifying a plurality of N-detect parameters based on a countable number of times the fault test recipes are configured to test a potential fault. Such systems and methods may include determining a plurality of weighting parameters based on the plurality of N-detect parameters. Such systems and methods may include generating the defect criticality for the defect based on a proximity between the plurality of testing locations and the defect location and the plurality of weighting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.