Patent · US Active

Photosensitive polyimide compositions

US11899364B2 · kind B2 · utility

1Cited by
17References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2020
Grant dateFeb 13, 2024
Priority date
Expiry dateApr 30, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/311
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

This disclosure relates to a dry film structure that includes a carrier substrate, and a polymeric layer supported by the carrier substrate. The polymeric layer includes at least one fully imidized polyimide polymer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.