Automated application of drift correction to sample studied under electron microscope
US11902665B2 · kind B2 · utility
2Cited by
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20Claims
0Family size
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Key dates
| Filing date | Jan 26, 2022 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Jun 9, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2594
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for calibrating a transmission electron microscope are disclosed. A fiducial mark on the sample holder is used to identify known reference points so that a current collection area and a through-hole on the sample holder can be located. A plurality of beam current and beam area measurements are taken, and calibration tables are extrapolated from the measurements for a full range of microscope parameters. The calibration tables are then used to determine electron dose of a sample during an experiment at a given configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.