Method and system for measuring a surface of an object comprising different structures using low coherence interferometry
US11906302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2023 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Apr 18, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, the method including: - acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module: classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signals to derive information on the structure at the measurement points, as a function of the class of each interferometric signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.