Electrostatic chuck heater and manufacturing method therefor
US11908725B2 · kind B2 · utility
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1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2020 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Feb 24, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/017
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to an electrostatic chuck heater having a bipolar structure, the electrostatic chuck heater comprising: a heater body having an internal electrode and an external electrode for selectively performing any one of an RF grounding function and an electrostatic chuck function according to a semiconductor process mode; and a heater support mounted below the heater body so as to support the heater body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.