Methods and systems including pulsed dual-beam charge neutralization
US11915901B2 · kind B2 · utility
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26Claims
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Key dates
| Filing date | Aug 27, 2021 |
| Grant date | Feb 27, 2024 |
| Priority date | — |
| Expiry date | Aug 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2527
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.