Patent assignee · JP · COMPANY

ULVAC-PHI, INCORPORATED

8Patents
6Active
8Granted
46Portfolio score

Filing activity: Jul 24, 2002 → Aug 27, 2021 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7581916B2 Sample introduction and transfer system and method Electricity 6 Active
US9159539B2 Method and apparatus to provide parallel acquisition of mass spectrometry/mass spectrometry data Electricity 2 Active
US7034295B2 Photoemission electron microscopy and measuring method using the microscopy Electricity 1 Expired
US9372161B2 Ion source, ion gun, and analysis instrument Electricity 0 Active
US11915901B2 Methods and systems including pulsed dual-beam charge neutralization Electricity 0 Active
US11145484B2 Gas cluster ion beam apparatus and analyzing apparatus Electricity 0 Active
US9080947B2 X-ray irradiation device and analysis device Electricity 0 Active
US6726739B2 Method of treating metal analysis sample and device thereof Physics 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.