Workpiece inspection apparatus
US11915955B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 23, 2023 |
| Grant date | Feb 27, 2024 |
| Priority date | — |
| Expiry date | Jun 23, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A workpiece inspection apparatus includes: a first stage configured to transfer a first table, on which a workpiece accommodated in a tray is loaded at a first transfer position, to an inspection position; an inspection tool configured to inspect workpieces at the inspection position; a second stage configured to transfer a second table, on which another workpiece is loaded at a second transfer position, to the inspection position after retraction of the first table; and a transporter configured to load the workpieces before inspection to the first and second transfer positions and unload the workpieces after inspection from the first and second transfer positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.