Methods and apparatuses for chemical delivery for brush conditioning
US11923208B2 · kind B2 · utility
0Cited by
6References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2017 |
| Grant date | Mar 5, 2024 |
| Priority date | — |
| Expiry date | Jun 23, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is disclosure for embodiments providing delivery of chemicals for conditioning a brush offline, where the brush is not coupled to a machine that makes use of the brush to clean a surface of an object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.