Robot
US11926039B2 · kind B2 · utility
0Cited by
4References
10Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 25, 2020 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Aug 28, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J9/042
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.