Micromachined thermal time-of-flight fluidic concentration metering device
US11927555B2 · kind B2 · utility
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3References
12Claims
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Assignee
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Key dates
| Filing date | May 25, 2021 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Nov 8, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.