Hydrogen potential sensor

US11927562B2 · kind B2 · utility

Assignee

• Luxembourg Institute of Science & Technology (LIST) · LU

Inventors

• Cesar PASCUAL GARCIA · Esch-sur-Alzette, LU
• Damien Lenoble · Wellin, BE

Key dates

• Filing date: Nov 10, 2021
• Grant date: Mar 12, 2024
• Expiry date: Nov 10, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/414
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pH sensor comprises: a chamber for receiving an electrolyte solution; a first and a second ion-sensitive field effect transistor (ISFETs), each of the first and second ISFETs having a source terminal, a drain terminal and a transistor channel extending between the source terminal and the drain terminal, a dielectric layer with a sensing surface arranged in the chamber so as to be contactable by the electrolyte solution, the dielectric layer separating the sensing surface from the transistor channel; a first measurement circuit configured to measure a first source-drain resistance across the transistor channel of the first ISFET; and a second measurement circuit configured to measure a second source-drain resistance across the transistor channel of the second ISFET. The first and second measurement circuits include a common reference electrode, the reference electrode arranged contactable by the electrolyte solution in the chamber. The dielectric layer of first ISFET has a first thickness and the dielectric layer of the second ISFET has a second thickness different from the first thickness.