Patent · US Active

Signal processing circuit for triple-membrane MEMS device

US11932533B2 · kind B2 · utility

2Cited by

6References

17Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Marc Fueldner · Neubiberg, DE
Andreas Wiesbauer · Powirtschach, AT
Athanasios Kollias · Munich, DE

Key dates

Filing date	Dec 21, 2020
Grant date	Mar 19, 2024
Priority date	—
Expiry date	Jan 11, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2410/03
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed low pressure chamber, and a signal processing circuit configured to read-out output signals of the triple-membrane MEMS device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.