Patent · US Active

MEMS capacitive sensor including improved contact separation

US11933689B2 · kind B2 · utility

0Cited by

1References

15Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Heribert Weber · Leverkusen, DE
Christoph Hermes · Kirchentellinsfurt, DE
Hans Artmann · Magstadt, DE
Peter Schmollngruber · Aidlingen, DE
Thomas Friedrich · Bietigheim-Bissingen, DE
Volkmar Senz · Metzingen, DE

Key dates

Filing date	Mar 26, 2020
Grant date	Mar 19, 2024
Priority date	—
Expiry date	Nov 26, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0618
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor device having a first counter electrode extending under an intermediate carrier, and having a first distance between the intermediate carrier and the first counter electrode being modifiable by the pressure on the movable region, and the first counter electrode encompassing, under the intermediate carrier, at least one electrically separated region that is disposed below a spacing element and includes at least a lateral extent of the spacing element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.