Micromechanical component for a capacitive pressure sensor device

US11940345B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Thomas Friedrich · Bietigheim-Bissingen, DE
• Christoph Hermes · Kirchentellinsfurt, DE
• Hans Artmann · Magstadt, DE
• Heribert Weber · Leverkusen, DE
• Peter Schmollngruber · Aidlingen, DE
• Volkmar Senz · Metzingen, DE

Key dates

• Filing date: Dec 19, 2019
• Grant date: Mar 26, 2024
• Expiry date: Nov 2, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical component for a capacitive pressure sensor device includes a substrate; a frame structure that frames a partial surface; a membrane that is tensioned by the frame structure such that a self-supporting region of the membrane extends over the framed partial surface and an internal volume with a reference pressure therein is sealed in an airtight fashion, the self-supporting region of the membrane being deformable by a physical pressure on an external side of the self-supporting region that not equal to the reference pressure; a measurement electrode situated on the framed partial surface; and a reference measurement electrode that is situated on the framed partial surface and is electrically insulated from the measurement electrode.