Plane grating calibration system
US11940349B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 13, 2020 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Mar 23, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.