Kaiming Yang
26Patents
2h-index
46Co-inventors
53Inventor score
Filing activity: Mar 14, 2008 → Jul 1, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9879979B2 | Heterodyne grating interferometer displacement measurement system | Physics | 3 | Active |
| US9903704B2 | Three-DOF heterodyne grating interferometer displacement measurement system | Physics | 2 | Active |
| US8084897B2 | Micro stage with 6 degrees of freedom | Physics | 1 | Active |
| US9752643B2 | Negative stiffness system for gravity compensation of micropositioner | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US8599361B2 | Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof | Physics | 1 | Active |
| US10532832B2 | Magnetic levitation reaction sphere | Electricity | 1 | Active |
| US9885556B2 | Dual-frequency grating interferometer displacement measurement system | Physics | 1 | Active |
| US8284380B2 | Dual-stage switching system for lithographic machine | Physics | 1 | Active |
| US9791789B2 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Physics | 0 | Active |
| US12038690B2 | Laser interference photolithography system | Physics | 0 | Active |
| US10597172B2 | Magnetic-fluid momentum sphere | Electricity | 0 | Active |
| US8958078B2 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space | Physics | 0 | Active |
| US9766054B2 | Planar motor rotor displacement measuring device and its measuring method | Physics | 0 | Active |
| US11022423B2 | Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system | Physics | 0 | Active |
| US9995569B2 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage | Physics | 0 | Active |
| US12189300B2 | Scanning interference lithographic system | Physics | 0 | Active |
| US9310797B2 | Single degree of freedom vibration isolating device of linear motor and motion control method thereof | Physics | 0 | Active |
| US9310782B2 | Method for measuring displacement of planar motor rotor | Physics | 0 | Active |
| US9455650B2 | Two-dimensional locating method of motion platform based on magnetic steel array | Physics | 0 | Active |
| US12393127B2 | Exposure light beam phase measurement method in laser interference photolithography, and photolithography system | Physics | 0 | Active |
| US12346030B2 | Device and method for regulating and controlling incident angle of light beam in laser interference lithography | Physics | 0 | Active |
| US12169367B2 | Vertical motion protection method and device based on dual-stage motion system of photolithography machine | Physics | 0 | Active |
| US9869857B2 | Optical grating phase modulator for laser interference photoetching system | Physics | 0 | Active |
| US11940349B2 | Plane grating calibration system | Physics | 0 | Active |
| US9182217B2 | Method for measuring displacement of large-range moving platform | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.