Device and method for detecting a surface defect using interference between polarized lights
US11940377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2019 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Aug 24, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0683
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a detection device and a detection method. The detection device uses the signal light formed by the interference of the first and the second echo lights reflected on the surface of the component to be detected to obtain the first light intensity distribution information of the signal light corresponding to the sampling position on the component to be detected by the first detection device to obtain the phase distribution of the signal light according to the intensity distribution to obtain the defect distribution data of the component to be detected. Among them, the first detection apparatus includes more than two polarization detectors, or a non-polarization detector and at least one polarization detector. The present invention can effectively achieve the polarization state analysis of the signal light, achieve the high-precision detection of the component to be detected in the longitudinal direction, and have advantages of good reliability, high stability and fast detection speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.