Patent · US Active

Electrostatic discharge protection cell and antenna integrated with through silicon via

US11942441B2 · kind B2 · utility

0Cited by
5References
20Claims
0Family size

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Inventors

Key dates

Filing dateSep 21, 2021
Grant dateMar 26, 2024
Priority date
Expiry dateApr 8, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2223/6677
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a through-silicon via (TSV) in a TSV zone in a substrate and the TSV extends through the substrate; an ESD cell proximal to a first end of the TSV and in contact with the TSV zone, the ESD cell including a set of diodes electrically connected in parallel to each other; an antenna pad electrically connected to a second end of the TSV; and an antenna electrically connected to the antenna pad and extending in a first direction, the first direction is parallel to a major axis of the TSV. The semiconductor device includes a conductive pillar extending parallel to the TSV at a same side of the substrate as the antenna pad, wherein a first end of the conductive pillar electrically connects to the antenna pad, and a second end of the conductive pillar electrically connects to the set of diodes of the ESD cell.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.