Autofocusing method for an imaging device
US11947185B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Nov 8, 2021 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | Jul 9, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/671
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to an autofocusing method for an imaging device (for semiconductor lithography) comprising an imaging optical unit, an object to be measured and an autofocusing device having a reflective illumination, comprising the following method steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.