Patent · US Active

Method and apparatus for examining a beam of charged particles

US11961705B2 · kind B2 · utility

0Cited by

2References

39Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Daniel Rhinow · Munich, DE
Markus Bauer · Oberkochen, DE
Rainer Fettig · Steinmauern, DE
David Lämmle · Darmstadt, DE
Marion Batz · Wiesbaden, DE
Katharina Gries · Darmstadt, DE
Sebastian Vollmar · Dieburg, DE
Petra Spies · Mainz, DE
Ottmar Hoinkis · Darmstadt, DE

Key dates

Filing date	Dec 22, 2020
Grant date	Apr 16, 2024
Priority date	—
Expiry date	Mar 6, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31744
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.