Radio frequency match network and generator
US11961711B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Jun 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24564
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of providing data on radio frequency pulses in a radio frequency plasma processing system, the method including measuring an electrical parameter within a matching network of the radio frequency plasma processing system; determining an attribute of the measurement of the electrical parameter; defining a first statistic for the attribute of the measurement of the electrical parameter; defining a second statistic based on the first statistic for at least one of a phase and a process; delivering the first statistic and second statistic to a user; and storing the first statistic and the second statistic within the matching network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.