Patent · US Active

Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor

US11962973B2 · kind B2 · utility

0Cited by

10References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Bretthauer · Munich, DE
David Tumpold · Tauberbischofsheim, DE
Pradyumna Mishra · San Jose, US
Daniel Neumaier · Feldkirchen in Kärnten, AT

Key dates

Filing date	Feb 6, 2023
Grant date	Apr 16, 2024
Priority date	—
Expiry date	Feb 6, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2410/03
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.