Sample inspection system comprising a beam former to project a polygonal shell beam
US11971371B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 16, 2020 |
| Grant date | Apr 30, 2024 |
| Priority date | — |
| Expiry date | Aug 3, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/401
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample inspection system contains a source of electromagnetic radiation and an apparatus that includes a beam former, a collimator and an energy resolving detector. The beam former is adapted to receive electromagnetic radiation from the source to provide a polygonal shell beam formed of at least three walls of electromagnetic radiation. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation at an angle. The energy resolving detector is arranged to detect radiation diffracted or scattered by a sample upon incidence of the polygonal shell beam onto the sample and transmitted by the collimator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.