Abnormal wafer image classification
US11972552B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Apr 22, 2021 |
| Grant date | Apr 30, 2024 |
| Priority date | — |
| Expiry date | Sep 3, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A semiconductor image classifier. Convolution functions are applied to modify the wafer images in order to extract key information about the image. The modified images are condensed then processed through a series of pairwise classifiers, each classifier configured to determine that the image is more like one of the pair than the other. Probabilities from each classifier are collected to form a prediction for each image.
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