Patent · US Active

Unlanded thermal dissipation pillar adjacent active contact

US11972999B2 · kind B2 · utility

1Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 7, 2021
Grant dateApr 30, 2024
Priority date
Expiry dateJan 19, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8503
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A structure includes an electrical device, and an active contact landed on a portion of the electrical device. The active contact includes a first body of a first material. A thermal dissipation pillar is adjacent the active contact and unlanded on but over the portion of the electrical device. The thermal dissipation pillar includes a second body of a second material having a higher thermal conductivity than the first material. The thermal dissipation pillar may be in thermal communication with a wire in a dielectric layer over the active contact and the thermal dissipation pillar. The electrical device can be any integrated circuit device that generates heat.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.