Micromechanical component for a capacitive pressure sensor device

US11976996B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Thomas Friedrich · Bietigheim-Bissingen, DE
• Christoph Hermes · Kirchentellinsfurt, DE
• Hans Artmann · Magstadt, DE
• Heribert Weber · Leverkusen, DE
• Peter Schmollngruber · Aidlingen, DE
• Volkmar Senz · Metzingen, DE

Key dates

• Filing date: Dec 18, 2019
• Grant date: May 7, 2024
• Expiry date: Apr 25, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.