Substrate transport apparatus
US11978651B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 15, 2022 |
| Grant date | May 7, 2024 |
| Priority date | — |
| Expiry date | Mar 15, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67748
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.