Liquid lithium supply and regulation
US11987489B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2023 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Mar 10, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/20
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, method for flowing liquid lithium to a processing chamber is provided and includes flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, where the liquid lithium delivery module is fluidly coupled to the lithium refill container, and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.