Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US11988593B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2020 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Nov 20, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1454
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to interferometric detection of particles and optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided exhibiting enhanced alignment and stability for interferometric detection of particles and/or optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided that include compensation means for mitigating the impact of internal and external stimuli and changes in operating conditions that can degrade the sensitivity and reliability of particle detection via optical methods, including interferometric-based techniques and/or systems for optical detection of particles having size dimensions less than or equal to 100 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.