Ceramic susceptor
US11990322B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2023 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Jul 31, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure may include: an insulating plate in which a RF electrode is disposed; a shaft connected to the insulating plate at one end and comprising a separator at a remaining end; a connection mount having an upper portion connected to the remaining end of the shaft; a first rod and a second rod connected to the RF electrode and penetrating the separator to extend into the connection mount; and a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod, wherein the connection member may include an elastic member configured to absorb a difference in deformation due to heat among the first rod, the second rod, and the draw-in rod.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.