Dual micro-electro mechanical system and manufacturing method thereof
US11993512B2 · kind B2 · utility
0Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2022 |
| Grant date | May 28, 2024 |
| Priority date | — |
| Expiry date | Jul 15, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/038
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.